SAMPLE TABLE
PROBLEM TO BE SOLVED: To solve such problems that, when a sample table made of carbon is used as the sample table for a scanning electron microscope to which an energy dispersion type X-ray analyzer is attached, a crack or the like occurs in the sample table due to brittle fracture, and, if an alumi...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To solve such problems that, when a sample table made of carbon is used as the sample table for a scanning electron microscope to which an energy dispersion type X-ray analyzer is attached, a crack or the like occurs in the sample table due to brittle fracture, and, if an aluminum sample table is used, aluminum which is a constituent element of the sample table is erroneously detected when performing elemental analysis on metal power of an unknown sample.SOLUTION: Disclosed is a sample table 8 used in an electron microscope in order to install a sample irradiated with electron beams. This sample table 8 includes: a metallic body part 11; and a pedestal part 12 made of carbon which covers the top surface of the body part 11. The top surface 12a of the pedestal part 12 serves as an installation surface of the sample.SELECTED DRAWING: Figure 2
【課題】エネルギー分散型Ｘ線分析装置が付属する走査型電子顕微鏡用の試料台として、カーボン製の試料台を使用すると、脆性破壊によって試料台に割れ等が生じるという問題があり、アルミニウム製の試料台を使用すると、未知試料の金属粉末を元素分析するときに、試料台の構成元素であるアルミニウムが誤検出されるという問題があった。【解決手段】電子顕微鏡で電子線が照射される試料を設置するために用いられる試料台８である。この試料台８は、金属製の本体部１１と、本体部１１の上面を覆うカーボン製の台座部１２と、を備える。台座部１２の上面１２ａは、試料の設置面になっている。【選択図】図２ |
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