VACUUM PROCESSING SYSTEM

PROBLEM TO BE SOLVED: To suppress particles soaring when bending a housing forming a vacuum atmosphere.SOLUTION: A housing 101 includes an exhaust hole 111 for forming vacuum atmosphere, a suction hole 112 for introducing gas, and holding means for holding a substrate 200, and a vacuum processing sy...

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Bibliographische Detailangaben
Hauptverfasser:	KONDO YOSHIAKI, MATSUMOTO HIDEJI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ADVERTISING BASIC ELECTRIC ELEMENTS CRYPTOGRAPHY DISPLAY DISPLAYING EDUCATION ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY LABELS OR NAME-PLATES PHYSICS SEALS SEMICONDUCTOR DEVICES SIGNS
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