VACUUM PROCESSING SYSTEM

PROBLEM TO BE SOLVED: To suppress particles soaring when bending a housing forming a vacuum atmosphere.SOLUTION: A housing 101 includes an exhaust hole 111 for forming vacuum atmosphere, a suction hole 112 for introducing gas, and holding means for holding a substrate 200, and a vacuum processing sy...

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Bibliographische Detailangaben
Hauptverfasser:	KONDO YOSHIAKI, MATSUMOTO HIDEJI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ADVERTISING BASIC ELECTRIC ELEMENTS CRYPTOGRAPHY DISPLAY DISPLAYING EDUCATION ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY LABELS OR NAME-PLATES PHYSICS SEALS SEMICONDUCTOR DEVICES SIGNS
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Zusammenfassung:	PROBLEM TO BE SOLVED: To suppress particles soaring when bending a housing forming a vacuum atmosphere.SOLUTION: A housing 101 includes an exhaust hole 111 for forming vacuum atmosphere, a suction hole 112 for introducing gas, and holding means for holding a substrate 200, and a vacuum processing system includes a fine particle detector 102 having a detection tool 121 arranged between the suction hole 112 and the peripheral edge of the substrate 200 thus held, in a route through which the gas is spread when introduced from the suction hole 112.SELECTED DRAWING: Figure 1 【課題】真空雰囲気を形成する筐体をベントする際、舞い上がるパーティクルを抑制する。【解決手段】筐体１０１は、真空雰囲気を形成するための排気孔１１１と、気体を導入するための吸気孔１１２と、基板２００を保持する保持手段とを備え、吸気孔１１２から気体を導入する際に気体が拡散していく経路において、吸気孔１１２と保持された基板２００の周端縁との間に配置される検出用具１２１を有する微粒子検出装置１０２とを備える真空処理システム。【選択図】図１