VACUUM EVAPORATION SYSTEM

PROBLEM TO BE SOLVED: To provide a vacuum evaporation system which can control combustible gas concentration in an exhaust system to a predetermined control concentration or less by paying an attention to a combustible gas having a lower limit concentration of ignition, inflammation or explosion, hy...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KANAI TAKASHI, KANEDA NOBUHIRO, HAMAZAKI KOICHI, MIZUTA MITSURU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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