SPUTTERING TARGET

PROBLEM TO BE SOLVED: To provide a sputtering target that prevents cracking of a sputtering target material and is stably retained to a substrate.SOLUTION: The sputtering target includes: the substrate formed of a metal; the sputtering target material provided at one surface of the substrate; and a...

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Bibliographische Detailangaben
1. Verfasser:	TATENO SATOSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a sputtering target that prevents cracking of a sputtering target material and is stably retained to a substrate.SOLUTION: The sputtering target includes: the substrate formed of a metal; the sputtering target material provided at one surface of the substrate; and a joint material provided between the substrate and the sputtering target material. The joint material includes at least a first metallic element and a second metal element, where the concentration of the second metal element is 10 ppm or more and 5000 ppm or less based on the first metallic element.SELECTED DRAWING: Figure 1 【課題】スパッタリングターゲット材の割れを防ぎ、基材に安定して保持される、スパッタリングターゲットを提供することを目的の一つとする。【解決手段】金属で形成された基材と、基材の一面に設けられたスパッタリングターゲット材と、基材と前記スパッタリングターゲット材との間に設けられた接合材とを有し、接合材は、第１の金属元素と第２の金属元素を少なくとも含み、第２の金属元素は第１の金属元素に対して１０ｐｐｍ以上、５０００ｐｐｍ以下の濃度で含まれるスパッタリングターゲットが提供される。【選択図】図１