HIGH FREQUENCY POWER SUPPLY
PROBLEM TO BE SOLVED: To suppress overshoot and ringing that occur in the high frequency power when starting output of the high frequency power to a load.SOLUTION: A high frequency power 1 includes a high frequency signal generation unit 5 for generating a high frequency signal v inputted to two DC-...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng ; jpn |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PROBLEM TO BE SOLVED: To suppress overshoot and ringing that occur in the high frequency power when starting output of the high frequency power to a load.SOLUTION: A high frequency power 1 includes a high frequency signal generation unit 5 for generating a high frequency signal v inputted to two DC-RF conversion units 4A, 4B, and an RF distribution unit 6. The DC-RF conversion units 4A, 4B output the high frequency signal v, inputted from the RF distribution unit 6, to a load while amplifying. The high frequency signal generation unit 5 controls the frequency of a high frequency signal vto the resonance frequency of the circuit, when viewing the load side from the DC-RF conversion units 4A, 4B, at the time of starting output of the high frequency power to the load, and switches to a frequency of provision at a moment in time when a predetermined time has elapsed after start of output.SELECTED DRAWING: Figure 1
【課題】負荷への高周波電力の出力開始時に当該高周波電力に発生するオーバーシュートやリンギングを抑制する。【解決手段】高周波電源1は2つのDC−RF変換部4A,4Bに入力する高周波信号vを生成するための高周波信号生成部5とRF分配部6を備える。DC−RF変換部4A,4BはRF分配部6から入力される高周波信号vを増幅して負荷に出力する。高周波信号生成部5は高周波電力の負荷への出力開始時は高周波信号voの周波数を、DC−RF変換部4A,4Bから負荷側を見た回路の共振周波数に制御し、出力開始時から所定の時間が経過した時点で規定の周波数に切り換える。【選択図】図1 |
---|