METHOD OF CORRECTING ERROR IN POSITION MEASURING DEVICES

PROBLEM TO BE SOLVED: To provide a method that places the least demands on a memory capacity of an accompanying signal processing unit with respect to a correction table to be used in a method of correcting an error in a position measurement device.SOLUTION: The present invention relates to a method...

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Bibliographische Detailangaben
Hauptverfasser:	ULRICH BICHLMEIER, DRESCHER JOERG
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR PHYSICS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method that places the least demands on a memory capacity of an accompanying signal processing unit with respect to a correction table to be used in a method of correcting an error in a position measurement device.SOLUTION: The present invention relates to a method of correcting errors in a position measurement system including a reference unit which is scanned by at least one scanning unit. Respective correction values are made available for the prescribed number of correction points on the reference unit, and the correction values are obtained in calibration to be implemented prior to measurement. In a measurement mode, a detected position value is used for correction. The correction value obtained in the calibration is compressed for the measurement mode.SELECTED DRAWING: Figure 1 【課題】位置測定装置のエラーを補正する方法において、使用される補正表に関して、付属の信号処理ユニットのメモリ容量に課される要求ができるだけ小さい方法を提供する。【解決手段】本発明は、少なくとも１つの走査ユニットにより走査される基準器を備える位置測定システムのエラーを補正する方法に関する。基準器の所定数の補正点についてそれぞれ補正値が準備され、これらの補正値は測定前に行われる較正時に得られ、測定モードで、検出された位置値を補正するために用いられる。較正時に得られた補正値は測定モードのために圧縮される。【選択図】図１