DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

PROBLEM TO BE SOLVED: To provide a defect inspection device and a defect inspection method which make it possible to correct image data pertaining to the external appearance of an object to be inspected, even when the center axis of the object to be inspected and the center axis of a conical mirror...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HISANAGA MASARU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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