DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

PROBLEM TO BE SOLVED: To provide a defect inspection device and a defect inspection method which make it possible to correct image data pertaining to the external appearance of an object to be inspected, even when the center axis of the object to be inspected and the center axis of a conical mirror are significantly shifted from each other.SOLUTION: Provided are a defect inspection device 1 and a defect inspection method in which: the center and radius of a circle pertaining to the top face of an object to be inspected, the center of a circle pertaining to its outer surface, and an inter-center distance between the center of the first circle and the center of the second circle are calculated on image data; when the radius of the first circle is larger than the inter-center distance, two tangential lines passing through the center of the second circle and in contact with the first circle are drawn, and the second circle is divided into a first to a fourth areas by the tangential lines; and different correction processes are carried out in the first area comprising pixels that receive reflected light from a portion of the outer surface of the object to be inspected and in the third area comprising pixels that receive reflected light from the rest of the outer surface.SELECTED DRAWING: Figure 1 【課題】検査対象物の中心軸と円錐ミラーの中心軸とが大きくずれた場合であっても、検査対象物の外観に係る画像データの補正を可能とする欠陥検査装置及び欠陥検査方法を提供する。【解決手段】画像データ上で、検査対象物の上面に係る円の中心及び半径、その外側面に係る円の中心、並びに、第１の円の中心と前記第２の円の中心との間の中心間距離を算出し、第１の円の半径が中心間距離より大きい場合に、第２の円の中心を通り第１の円に接する２本の接線を引き、第２の円を接線により第１乃至第４の領域に区切り、検査対象物の外側面の一部からの反射光を受けた画素からなる第１の領域と、該外側面の残部からの反射光を受ける画素からなる第３の領域とで異なる補正処理を行う欠陥検査装置１及び欠陥検査方法。【選択図】図１