ATMOSPHERIC PRESSURE PLASMA PROCESSING DEVICE

PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma processing device capable of performing a surface treatment on a belt-shaped sheet at a high speed continuously.SOLUTION: An atmospheric pressure plasma processing device comprises: a first electrode 11 having a roller form; a second electrode 12 opposed to the first electrode 11; a barrier 13 made of a dielectric, and provided in contact with the second electrode 12 between the first electrode 11 and the second electrode 12; and a gas-supply unit for supplying a plasma excitation gas to between the first electrode 11 and the barrier 13. The gas-supply unit 2 has: a chamber C provided to adjoin the barrier 13 upstream of the second electrode 12 in a transporting direction of a sheet S; a gas-supply source for supplying the plasma excitation gas; a supply port 28 provided on the chamber C, to which the gas-supply source is connected; a slit-like discharge port 29 for discharging the plasma excitation gas toward the sheet S from the chamber C; and an upstream seal part 21A extending from the chamber C toward the first electrode 11 upstream of the discharge port 29 in the transporting direction, and opposed to the sheet S through a gap 27A.SELECTED DRAWING: Figure 3 【課題】帯状のシートを連続的かつ高速で表面処理する大気圧プラズマ処理装置を提供する。【解決手段】ローラ形状の第１電極１１と、第１電極１１と対向する第２電極１２と、第１電極１１と第２電極１２の間で第２電極１２に接して設けられた誘電体からなるバリア１３と、第１電極１１とバリア１３の間にプラズマ励起ガスを供給するガス供給装置とを備える。ガス供給装置２は、第２電極１２のシートＳの搬送方向上流側でバリア１３と連続して設けられるチャンバＣと、プラズマ励起ガスを供給するガス供給源と、チャンバＣに設けられ、ガス供給源が接続される供給口２８と、チャンバＣ内からシートＳに向けてプラズマ励起ガスを送り出すためのスリット状の送出口２９と、送出口２９よりも搬送方向上流側でチャンバＣから第１電極１１に向けて延出し、シートＳに対し隙間２７Ａを介して対向する上流側シール部２１Ａとを有する。【選択図】図３