ELECTROLYTIC APPARATUS OF INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, PRODUCTION METHOD OF INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, AND PRODUCTION METHOD OF SPUTTERING TARGET

PROBLEM TO BE SOLVED: To provide an electrolytic apparatus of indium hydroxide powder or tin hydroxide powder, with which the indium hydroxide powder or the tin hydroxide powder having excellent uniformity of particle diameters and narrow width of particle size distribution is produced.SOLUTION: An...

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Hauptverfasser: KAMO TETSUO, SUGAMOTO NORIAKI, MORIMOTO TOSHIO
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an electrolytic apparatus of indium hydroxide powder or tin hydroxide powder, with which the indium hydroxide powder or the tin hydroxide powder having excellent uniformity of particle diameters and narrow width of particle size distribution is produced.SOLUTION: An electrolytic apparatus 1, with which indium or tin is electrolyzed and indium hydroxide powder or tin hydroxide powder is produced, has an electrolytic tank 10 with a plurality of electrodes installed therein, an adjustment tank 20 for adjusting an electrolytic solution 11, and a circulation means 30 connected with the electrolytic tank 10 and the adjustment tank 20, having a plurality of nozzles 33 to supply the electrolytic solution 11 into the electrolytic tank 10 installed in the vicinity of a tank wall 17b of the electrolytic tank 10 on the side opposite to the adjustment tank 20, and circulating the electrolytic solution 11, in which the electrolytic solution 11 is made to jet from the nozzles 33 to the side of the adjustment tank 20 by the circulation means 30 in parallel to the electrodes.SELECTED DRAWING: Figure 1 【課題】粒径の均一性に優れ、粒度分布の幅が狭い水酸化インジウム粉又は水酸化スズ粉を生成することが可能な水酸化インジウム粉又は水酸化スズ粉の電解装置を提供する。【解決手段】インジウム又はスズを電解して水酸化インジウム粉又は水酸化スズ粉を生成する電解装置1が、複数の電極が設けられた電解槽10と、電解液11を調整する調整槽20と、電解槽10及び調整槽20に接続され、電解槽10内に電解液11を供給する複数のノズル33が電解槽10の調整槽20と反対側の槽壁17b付近に設けられ、電解液11を循環させる循環手段30とを有し、循環手段30により、ノズル33から調整槽20側に向って電極と平行に電解液11を噴流させる。【選択図】図1