THICKNESS MEASURING DEVICE FOR SPECIFIC ELEMENT AND THICKNESS MEASURING METHOD FOR SPECIFIC ELEMENT

PROBLEM TO BE SOLVED: To accurately and remotely measure a thickness of a specific element that may be both in the air and in water.SOLUTION: A thickness measuring device for a specific element comprises: a laser source emitting laser light for generating plasma of an element while piercing the surface of a measurement object 5; an assist gas supply section; a measurement head 10 which includes a first optical fiber 22 for transmitting the laser light from the laser source to the surface of the measurement object 5, a second optical fiber 21 for transmitting plasma light condensed by a condensing optical system 25, and includes a space 26 which is formed on a surface in contact with the measurement object 5 and to which an assist gas is supplied from the assist gas supply section via a gas tube 24; a spectral measurement section which outputs a signal indicating a light emission intensity pattern of optical spectrum of the plasma light transmitted by the second optical fiber 21; and a signal processing section which measures the thickness of the specific element from an output signal of the spectral measurement section.SELECTED DRAWING: Figure 2 【課題】気中と水中の両方に位置する可能性のある特定の元素の厚みを、遠隔から正確に計測する。【解決手段】被計測対象５の表面を穿孔しながら元素をプラズマ化するレーザ光を発射するレーザ光源と、アシストガス供給部と、レーザ光源からのレーザ光を被計測対象５の表面に伝送する第１の光ファイバ２２、集光光学系２５により集光されたプラズマ光を伝送する第２の光ファイバ２１、及び、被計測対象５と接する面に、アシストガス供給部からガスチューブ２４を経由してアシストガスが供給される空間２６を形成した計測ヘッド１０と、第２の光ファイバ２１により伝送されたプラズマ光の分光スペクトルの発光強度パターンを示す信号を出力する分光計測部と、分光計測部の出力信号から特定の元素の厚みを計測する信号処理部とを備える。【選択図】図２