ELECTROLYTIC DEVICE FOR INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, METHOD FOR PRODUCING INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, AND METHOD FOR PRODUCING SPUTTERING TARGET
PROBLEM TO BE SOLVED: To provide an electrolytic device for indium hydroxide powder or tin hydroxide powder having a narrow grain size distribution by an electrolytic process.SOLUTION: Provided is an electrolytic device 1 for indium hydroxide powder or tin hydroxide powder comprises: an electrolytic...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an electrolytic device for indium hydroxide powder or tin hydroxide powder having a narrow grain size distribution by an electrolytic process.SOLUTION: Provided is an electrolytic device 1 for indium hydroxide powder or tin hydroxide powder comprises: an electrolytic tank 10; a regulation tank 20 of regulating an electrolytic solution 11; and circulation means 30 connected to the electrolytic tank 10 and the regulation tank 20 and circulating the electrolytic solution 11, and the electrolytic solution 11 is circulated between the electrolytic tank 10 and the regulation tank 20 by the circulation means 30. By using the electrolytic device 1, indium hydroxide powder or tin hydroxide powder having a narrow grain size distribution can be obtained.SELECTED DRAWING: Figure 1
【課題】電解法により粒度分布の狭い水酸化インジウム粉又は水酸化スズ粉の電解装置を提供する。【解決手段】水酸化インジウム粉又は水酸化スズ粉の電解装置1は、電解槽10と、電解液11を調整する調整槽20と、電解槽10と調整槽20とに接続され電解液11を循環する循環手段30とを有し、循環手段30により、電解槽10と調整槽20の間で電解液11を循環させる。このような電解装置1を用いることにより、粒度分布の狭い水酸化インジウム粉又は水酸化スズ粉が得られる。【選択図】図1 |
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