X-RAY COMPUTER TOMOGRAPHY APPARATUS AND X-RAY DETECTOR

PROBLEM TO BE SOLVED: To provide an X-ray computer tomography apparatus and an X-ray detector capable of X-ray detection at a higher precision.SOLUTION: The X-ray computer tomography apparatus includes an X-ray detector including: a first semiconductor chip which includes plural elements which conve...

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Hauptverfasser: NANBU SHUYA, NISHIJIMA TERU, HASHIMOTO ATSUSHI, MIYAMA KOICHI, KANAMARU SHUN, MATSUDA KEIJI, UMEHARA TAKAYA, SAGO TOMOHIDE
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an X-ray computer tomography apparatus and an X-ray detector capable of X-ray detection at a higher precision.SOLUTION: The X-ray computer tomography apparatus includes an X-ray detector including: a first semiconductor chip which includes plural elements which convert an X-ray into an electrical signal; a board which collects the electrical signals from the respective elements; a second semiconductor chip formed of the same material as the first semiconductor chip, which is disposed between the first semiconductor chip and the board; plural first electrodes connecting the respective elements on the first semiconductor chip to the second semiconductor chip; and plural second electrodes larger than the first electrodes, which connect the second semiconductor chip and the board. The second semiconductor chip wires the plural first electrodes and plural second electrodes in a one-to-one manner.SELECTED DRAWING: Figure 1 【課題】より高精細なX線検出を可能にするX線コンピュータ断層撮影装置及びX線検出器を提供すること。【解決手段】実施形態に係るX線コンピュータ断層撮影装置は、X線を電気信号に変換する複数の素子を含む第1半導体チップと、各素子からの電気信号を収集する基板と、第1半導体チップと基板の間に設けられ、第1半導体チップと同一の素材で形成された第2半導体チップと、第1半導体チップの各素子と第2半導体チップとを接続する複数の第1電極と、第2半導体チップと基板とを接続し、第1電極よりも大きい複数の第2電極とを備えるX線検出器を備える。また、第2半導体チップは、複数の第1電極と複数の第2電極とを1対1で配線する。【選択図】図1