OBSERVATION METHOD AND ANALYTICAL METHOD OF PARTICLES

PROBLEM TO BE SOLVED: To obtain an element mapping with which an analysis and a distribution state of low concentration elements existing on particle surfaces of fine particles that are berried in a resin and thinned become apparent.SOLUTION: The observation method and analytical method of particles 2 of a resin thin piece 1 formed by berrying a plurality of particles and being processed into a thin piece shape includes: irradiating the resin thin piece 1 with an electron beam in an observation field of observation means; while removing part of the resin, observing with the observation means particles 2 to be observed that are cross-section processed at both front and rear surfaces 5, 6 of the resin thin piece 1 and adheres to other particles 2; and analyzing the particles 2 to be observed with the analytical means.SELECTED DRAWING: Figure 3 【課題】樹脂に埋包して薄片化した微粒子の粒子表面に存在する低濃度元素の分析及び分布状態が明らかになる元素マッピングを得る。【解決手段】複数の粒子が埋包され薄片状に加工された樹脂薄片１の粒子２の観察方法及び分析方法であって、樹脂薄片１に対して観察手段の観察視野内に電子線を照射し、樹脂の一部を除去している間に、観察視野内にあり、樹脂薄片１の表裏の両面５、６で断面加工され他の粒子２と付着している被観察粒子２を観察手段で観察し、被観察粒子２を分析手段で分析する。【選択図】図３