FILMING APPARATUS
PROBLEM TO BE SOLVED: To provide a filming apparatus comprising: a cylindrical evaporation source having an internal space for accommodating a processed product; and a closure member for closing the internal space, wherein the ions discharged from the evaporation source by an arc discharge are depos...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a filming apparatus comprising: a cylindrical evaporation source having an internal space for accommodating a processed product; and a closure member for closing the internal space, wherein the ions discharged from the evaporation source by an arc discharge are deposited on the surface of a processed product, wherein the discharge is stabilized to suppress the Joule heat to be generated in the closure member.SOLUTION: A filming apparatus is provided, along the inner wall face 1a of an evaporation source 1, with an auxiliary electrode 3, to which there is applied a ground or positive voltage enabling the electrons e of an internal space 1A of an evaporation source 1 to flow thereinto.SELECTED DRAWING: Figure 2
【課題】処理物を収容する内部空間を有する筒状の蒸発源と、内部空間を密閉する閉塞部材とを備え、アーク放電によって蒸発源から放出されたイオンを処理物の表面に堆積させて成膜する成膜装置において、放電を安定させ、閉塞部材に発生するジュール熱を抑制する。【解決手段】蒸発源１の内部空間１Ａの電子ｅが流入することのできる接地又は正電圧がかけられた補助電極３が、蒸発源１の内壁面１ａに沿って備えられている。【選択図】図２ |
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