DEVICE AND METHOD FOR PRE-BAKING BOARD UPSTREAM OF PROCESSING CHAMBER

PROBLEM TO BE SOLVED: To provide device and method for performing pre-bake.SOLUTION: A pre-bake device for heating a board at the upstream side of a processing tool is configured to be coupled with EFEM (equipment front end module). The pre-bake device has a front surface containing plural slots arr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SATO HIROYUKI, OKUBO KENKICHI, KAMATA KEISUKE, SUWADA MASAE, ARAI IZUMI, FURUKAWARA KAZUAKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FURNACES FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL HEATING KILNS LIGHTING MECHANICAL ENGINEERING OPEN SINTERING OR LIKE APPARATUS OVENS RETORTS SEMICONDUCTOR DEVICES WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!