INFRARED SENSOR

PROBLEM TO BE SOLVED: To increase the amount of infrared rays entering an infrared sensor.SOLUTION: An infrared sensor has a substrate in which an open hole penetrating the interval between a surface on one side and a surface on the other side is formed, and an infrared absorption part formed on the...

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Bibliographische Detailangaben
Hauptverfasser:	KATO HIDEKI, MASUO HIDEKAZU, NAGAHISA TAKESHI, NOGUCHI EIGO, ANDO YUICHI, HOSHINO YUTARO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	COLORIMETRY ELECTRICITY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To increase the amount of infrared rays entering an infrared sensor.SOLUTION: An infrared sensor has a substrate in which an open hole penetrating the interval between a surface on one side and a surface on the other side is formed, and an infrared absorption part formed on the surface side on one side of the substrate. In the infrared sensor, the infrared absorption part is positioned on the open hole, and an antireflection film is formed on the side wall surface of the open hole.SELECTED DRAWING: Figure 1 【課題】赤外線センサーに入射する赤外線の光量を高めること。【解決手段】一側の面と他側の面との間を貫通する貫通孔が形成された基板と、基板の一側の面側に形成された赤外線吸収部とを有する赤外線センサーであって、赤外線吸収部は貫通孔の上に位置し、貫通孔の側壁面に反射防止膜が形成されている、赤外線センサーが提供される。【選択図】図１