MEASURING MICROSCOPE AND METHOD FOR SUPPORTING CORRECTION OF TILT OF SAMPLE
PROBLEM TO BE SOLVED: To provide a technique for manually correcting the tilt of a sample with ease.SOLUTION: A measuring microscope 100 includes a rotary stage 203, a XY stage 204, an operating unit 310, and a display control unit 320. The rotary state 203 has a rotary shaft parallel to an optical...
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Sprache: | eng ; jpn |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a technique for manually correcting the tilt of a sample with ease.SOLUTION: A measuring microscope 100 includes a rotary stage 203, a XY stage 204, an operating unit 310, and a display control unit 320. The rotary state 203 has a rotary shaft parallel to an optical axis of an objective lens 201 and is rotated by manual operation. The XY stage 204 is a linear stage moving the rotary stage 203 into a specific direction perpendicular to the optical axis of the objective lens 201. The operating unit 310 calculates the tilt of a sample S with respect to a predetermined direction, and the display control unit 320 causes a display 400 to display information on the tilt of the sample S on the basis of the tilt calculated by the operating unit 310.SELECTED DRAWING: Figure 1
【課題】試料の傾きを手動で容易に補正する技術を提供する。【解決手段】測定顕微鏡100は、回転ステージ203と、XYステージ204と、演算部310と、表示制御部320を備えている。回転ステージ203は、対物レンズ201の光軸と平行な回転軸を有し、手動操作により回転する。XYステージ204は、回転ステージ203を対物レンズ201の光軸と直交する所定方向に移動させるリニアステージである。演算部310は、所定方向に対する試料Sの傾きを算出し、表示制御部320は、演算部310で算出された試料Sの傾きに基づいて、試料Sの傾きに関する情報を表示装置400に表示させる。【選択図】図1 |
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