THERMAL TREATMENT DEVICE

PROBLEM TO BE SOLVED: To provide a thermal treatment device capable of reducing a number of components for sealing a penetrating part of a chamber.SOLUTION: On lifting pipes 31a and 31b penetrating stepped surfaces 15a and 15b of a chamber 11 and lifting an article supporting body 50, a through-hole...

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Bibliographische Detailangaben
Hauptverfasser:	TANGE MASAJI, MIYASHITA KOICHI, ITO TSUTOMU, KATSUYAMA KYOSUKE
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING FURNACES FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL HEATING KILNS LIGHTING MECHANICAL ENGINEERING NON-LINEAR OPTICS OPEN SINTERING OR LIKE APPARATUS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS OVENS PHYSICS RETORTS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a thermal treatment device capable of reducing a number of components for sealing a penetrating part of a chamber.SOLUTION: On lifting pipes 31a and 31b penetrating stepped surfaces 15a and 15b of a chamber 11 and lifting an article supporting body 50, a through-hole penetrating in a vertical direction is formed. Power for heating a treated article 70 is supplied from the outside to a heater 52 through the through-hole. Therefore, the lifting pipes 31a and 31b for lifting the article supporting body 50 function as piping through which a lead wire for supplying the power passes. Bellows 35a and 35b connecting the penetrating part of the stepped surfaces 15a and 15b of the chamber and the lifting pipes 31a and 31b exist. 【課題】チャンバの貫通部分を封止するための部品点数をより削減できる熱処理装置を提供する。【解決手段】チャンバ１１の段差面１５ａ，１５ｂを貫通し物品支持体５０を昇降させる昇降パイプ３１ａ，３１ｂに、上下方向に貫通する貫通孔が形成されている。そして、被処理物７０を加熱するための電力が外部からこの貫通孔を介してヒータ５２に供給されている。そのため、物品支持体５０を昇降する昇降パイプ３１ａ，３１ｂが、電力を供給するためのリード線が通過する配管を兼ねている。また、チャンバ１１の段差面１５ａ，１５ｂの貫通部分と昇降パイプ３１ａ，３１ｂとの間を接続するベローズ３５ａ，３５ｂが存在する。【選択図】図２