METHOD FOR PRODUCING RESIN SUBSTRATE, AND DEVICE

PROBLEM TO BE SOLVED: To provide a method for producing a resin substrate excellent in releasability and capable of suppressing the occurrence of damage when released and to provide a device.SOLUTION: The method for producing a resin substrate comprises a pretreatment step of treating at least one s...

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Hauptverfasser:	KIKUCHI HIROYUKI, KAI YOSHITO, FUKUNAGA HIROSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ADVERTISING AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G CHEMISTRY COMPOSITIONS BASED THEREON CRYPTOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DISPLAY DISPLAYING EDUCATION FREQUENCY-CHANGING GENERAL PROCESSES OF COMPOUNDING LABELS OR NAME-PLATES METALLURGY NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS ORGANIC MACROMOLECULAR COMPOUNDS PHYSICS SEALS SIGNS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF THEIR PREPARATION OR CHEMICAL WORKING-UP WORKING-UP
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for producing a resin substrate excellent in releasability and capable of suppressing the occurrence of damage when released and to provide a device.SOLUTION: The method for producing a resin substrate comprises a pretreatment step of treating at least one surface of a support composed of glass with a silane coupling agent, a coating step of coating a treated surface of the support subjected to treatment by the pretreatment step with a solution including a polyamic acid or a polyimide powder, a calcination step of heating the support after the coating step to form a resin substrate composed of polyimide on the support and a releasing step of releasing the resin substrate from the support. 【課題】剥離性に優れ、剥離時におけるダメージの発生を抑制できる樹脂基板の製造方法およびデバイスを提供する。【解決手段】本発明の樹脂基板の製造方法は、ガラスからなる支持体の少なくとも一方の面にシランカップリング剤を処理する前処理工程と、支持体における前処理工程による処理が施された処理面にポリアミック酸またはポリイミドパウダーを含む溶液を塗布する塗布工程と、塗布工程の後、支持体を加熱することで支持体にポリイミドからなる樹脂基板を形成する焼成工程と、支持体から樹脂基板を剥離する剥離工程と、を備えることを特徴とする。【選択図】図１