SAMPLE OBSERVATION METHOD

PROBLEM TO BE SOLVED: To provide a user-friendly examination system or observation system capable of properly examining or observing a sample using a charged particle technique and an optical technique.SOLUTION: To provide an examination or observation system includes: a first housing that forms at least a part of a first space which is capable of maintaining in a vacuum state which is at least a part of a region until a primary charged-particle radiation emitted from a charged particle irradiation part reaches to a sample; a second housing included in the first housing, which forms at least a part of a second space capable of storing the sample; a partition wall part, which is coaxially disposed with the charged particle irradiation part when emitting the primary charged particle radiation from the charged particle irradiation part to irradiate the sample and separates the first space from the second space; and an optical observation part that irradiates the sample and detects a ray of light from the sample from a direction identical to the direction of the charged particle irradiation part. 【課題】使い勝手良く試料を荷電粒子技術及び光学技術にて的確に検査又は観察することが可能な検査装置、観察装置が提供される。【解決手段】荷電粒子照射部から放出された一次荷電粒子線が試料に到達する間の少なくとも一部の領域となる真空状態に維持可能な第一空間の少なくとも一部を形成する第一の筐体と、該第一筐体に具備され前記試料を格納可能な第二空間の少なくとも一部を形成する第二筐体と、前記荷電粒子照射部から照射された一次荷電粒子線が試料上に照射する際の前記荷電粒子照射部の同軸上に配置され、前記第一空間と前記第二空間とを隔てる隔壁部と、前記試料に対し光を照射し、前記荷電粒子照射部と同方向から前記試料からの光を検出する光学式観察部と、を備える検査又は観察装置が提供される。【選択図】 図１