MANUFACTURING METHOD OF VALVE BODY

PROBLEM TO BE SOLVED: To provide a manufacturing method of valve body having less particle adhesion amount, and hard to generate contamination due to particles.SOLUTION: A manufacturing method of a valve body includes a dissolution treatment step of contacting at least one kind selected from aluminu...

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Bibliographische Detailangaben
Hauptverfasser:	IWAKI MASAMICHI, YOSHIDA NOBUHIRO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a manufacturing method of valve body having less particle adhesion amount, and hard to generate contamination due to particles.SOLUTION: A manufacturing method of a valve body includes a dissolution treatment step of contacting at least one kind selected from aluminum dissolvable base and aluminum dissolvable acid to a laminate having a seal material on the partial surface of a metal base material containing aluminum. It is preferable that the dissolution treatment step is executed to the laminate without interposing mechanical polishing treatment. An obtained valve body can be properly applied to a gate valve of a semiconductor manufacturing device. 【課題】パーティクル付着量が少なく、パーティクルによる汚染を起こしにくい弁体の製造方法を提供する。【解決手段】アルミニウムを含有する金属基材の一部の表面上にシール材を有する積層体に、アルミニウム溶解性の塩基及びアルミニウム溶解性の酸から選択される少なくとも１種を接触させる溶解処理工程を含む弁体の製造方法である。積層体に対して、機械的研磨処理を介在させることなく溶解処理工程を施すことが好ましい。得られる弁体は、半導体製造装置のゲートバルブ用として好適に用いることができる。【選択図】図１