LASER PROCESSOR AND LASER PROCESSING METHOD

PROBLEM TO BE SOLVED: To provide a laser processor and a laser processing method which can improve processing quality by eliminating defects such as a change in groove width and in groove depth even in the case of a workpiece in a laser processing acceleration and deceleration regions with different characteristics in a longitudinal direction and in a transverse direction.SOLUTION: In a laser processing method for processing a workpiece 7 by irradiating the same with laser beams, a train L1 of laser pulses of constant periods is oscillated to detect amounts of travel in the x-axis direction and the y-axis direction, respectively, of a table 8 loaded with the workpiece. When the detected amounts of travel in the x-axis direction and the y-axis direction are corrected to detect that the corrected amount of has reached a predetermined amount, an acoustic optical modulator (AOM) 4 is made to selectively direct a laser pulse L2 in the train L1 of laser pulses is in directions of use for processing. 【課題】レーザ加工の加減速領域において、また縦方向と横方向の加工特性が異なる非加工物の場合でも、溝幅、溝深さが変わる等の欠点をなくし、加工品質の向上を図ることができるレーザ加工装置及びレーザ加工方法を提供する。【解決手段】レーザビームを被加工物７に照射して被加工物を加工するレーザ加工方法において、一定周期のレーザパルス列Ｌ１を発振させ、被加工物が載置されるテーブル８のＸ軸方向とＹ軸方向の移動量をそれぞれ検出し、当該検出したＸ軸方向とＹ軸方向の移動量を補正し、補正された移動量が所定量に到達したことを検出したら、レーザパルス列Ｌ１中のレーザパルスＬ２を音響光変調器（ＡＯＭ）４で、選択的に加工に用いる方向に指向させるようにした。【選択図】図１