WAFER RECEPTACLE
PROBLEM TO BE SOLVED: To provide a wafer receptacle allowing a plurality of receptacles to be stored and carried while being stably stacked.SOLUTION: A wafer receptacle includes a lateral wall portion 120 on the top surface of a base, and wafers are stacked inside the lateral wall portion. The later...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a wafer receptacle allowing a plurality of receptacles to be stored and carried while being stably stacked.SOLUTION: A wafer receptacle includes a lateral wall portion 120 on the top surface of a base, and wafers are stacked inside the lateral wall portion. The lateral wall portion comprises: a body 100; a lid 200 covering the upper portion of the body to protect the wafers; a fitting portion 320 provided on the inner surface of a cover body of the lid; and a hook portion protruding to the top surface of the base of the body. The wafer receptacle includes: an assembling portion 300 where the fitting portion and the lateral wall portion are alternatively positioned so as to enclose the entire receiving chamber by the double-wall structure; and a stacking wall structure protruding downward from an outer end of the base of the body. On the top surface of the lid, the wafer receptacle includes: a stacking part provided with a fixing protrusion that is inserted into the inside of the stacking wall structure ; a positioning portion provided on the base of the body, formed in a "W"-shape in a side-cross section and having a groove portion provided at the center in the "W"-shape; and a position fixing portion 600 in which a fixing pin maintaining the body in a horizontal state to prevent fluctuation when the wafers are stacked is provided.
【課題】複数の保管容器が安定的に積み重ねられて保管及び運搬できる保管容器を提供する。【解決手段】受け台の上面に側壁部120を備えて、その内側にウェーハが積み重ねられ、側壁部は本体100と、本体の上部に覆い被せられてウェーハを保護する蓋体200と、蓋体のカバー体の内側面に配備される結着部320と本体の受け台の上面に突出するフック部とからなり、結着部と側壁部が交互に配設されて収納室の全体が2重壁体により取り囲まれるようにする組立部300と、本体の受け台の外側の端部から下向きに突出した積層壁体を備える。蓋体の上面にはこの積層壁体の内側に嵌め込まれる固定突起が配備される積層部と、本体の受け台に設けられ、側断面に「W」状に形成され、「W」状の中央に溝部が設けられる位置決め部と、ウェーハを積み重ねるときに本体の水平を維持して揺らぎを防ぐ固定ピンが配備される位置固定部600と、を備える。【選択図】図1 |
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