COVER GLASS STICKING METHOD

PROBLEM TO BE SOLVED: To provide a cover glass sticking method that can smoothly exfoliate a cover glass and make uniform the in-plane space between the cover glass and a sensor face when the sensor face is sealed by the cover glass.SOLUTION: In a method of sticking a cover glass 5 for forming a dam at a surface side of a sensor substrate having a light receiving area thereon by avoiding the light receiving area, setting a sensor substrate 4 and a cover glass 5 to two surface plates 2 which are provided in a vacuum chamber 1 and have plural mutually opposed adsorption holes 3 adjusted in in-plane parallelism, reducing the internal pressure of the surface plates 2 to adsorb and fix the sensor substrate 4 and the cover glass 5, and approaching the two mutually opposed surface plates to each other to seal the light receiving face side of the sensor substrate 4 provided with the dam 6, the internal pressure in the surface plates 2 is adjusted between the atmosphere pressure and the pressure in the vacuum chamber 1 when the cover glass 5 is released from adsorption and fixing. 【課題】カバーガラスにより封止する際に、カバーガラスをスムーズに脱離させることができ、カバーガラスとセンサ面との、面内空間を均一にすることができるカバーガラス貼り合せ方法を提供する。【解決手段】受光領域が形成されたセンサ基板の表面側に、受光領域を避けてダムを形成し、真空チャンバー１内に設けられ、面内平行を調整した対峙する複数吸着穴３を持つ、２つの定盤２に、センサ基板４とカバーガラス５をそれぞれセットし、定盤２内を低圧化することで、センサ基板４とカバーガラス５を吸着固定し、対峙する２つの定盤を近接させ、ダム６を設けたセンサ基板４の受光面側を封止するカバーガラス５の貼り合せ方法にであって、カバーガラス５の吸着固定を解除する時に、定盤２内の圧力を、大気と真空チャンバー１内の圧力との間に調整する。【選択図】図１