FILM FORMING METHOD, FILM FORMING APPARATUS, AND METHOD FOR MANUFACTURING RESIN FILM WITH A METAL THIN FILM USING THE APPARATUS

PROBLEM TO BE SOLVED: To provide a film forming method that prevents the deposition of sputter particles on both edges of an outer peripheral surface of a can roll while continuously and stably forming a film on both ends in the width direction of a substrate so as to have the same thickness as that at a central part of the substrate.SOLUTION: In a film forming method where a long resin film F conveyed by a roll-to-roll method is wound on an outer peripheral surface of a can roll 56 having the outer peripheral surface wider than the width of the film F and provided with a cooling mechanism to form a metal thin film on the surface of the resin film F by a dry plating method while cooling the resin film F, a pair of long thin film materials 71a, 71b are conveyed parallel to the conveyance direction of the resin film F by a roll-to-roll method so as to cover both edges of the outer peripheral surface not wound by the resin film F and to be respectively interposed between the resin film F and the outer peripheral surface on both edges in the width direction of the resin film F. 【課題】 基材の幅方向の両端部にも中央部分と同じ厚さの膜を連続的に安定して成膜しつつ、キャンロール外周面の両縁部にスパッタ粒子が堆積するのを防止する成膜方法を提供する。【解決手段】 ロールツーロール方式で搬送される長尺状の樹脂フィルムＦを、その幅よりも幅広の外周面を有し且つ冷却機構を備えたキャンロール５６の該外周面に巻きつけて冷却しながら樹脂フィルムＦの表面に乾式めっき法で金属薄膜を成膜する成膜方法であって、該外周面のうち樹脂フィルムＦが巻き付いていない両縁部をそれぞれ覆い且つ該外周面に巻き付いている樹脂フィルムＦの幅方向両端部においてそれぞれ樹脂フィルムＦと該外周面との間に介在するように一対の長尺状の薄膜材７１ａ、７１ｂを樹脂フィルムＦの搬送方向と平行にロールツーロール方式で搬送する。【選択図】 図２