CLEANING METHOD FOR CLEANING OBJECT

PROBLEM TO BE SOLVED: To enable cleaning works for a cleaning object such as immersion cleaning, steam cleaning, and drying with a cleaning liquid to be performed precisely with simple means.SOLUTION: After the steam cleaning or liquid cleaning of a cleaning object 8 is performed in a cleaning chamb...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: UCHINO MASATOSHI, UCHINO MASAHIDE
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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