CLEANING METHOD FOR CLEANING OBJECT

PROBLEM TO BE SOLVED: To enable cleaning works for a cleaning object such as immersion cleaning, steam cleaning, and drying with a cleaning liquid to be performed precisely with simple means.SOLUTION: After the steam cleaning or liquid cleaning of a cleaning object 8 is performed in a cleaning chamber 3, the cleaning object 8 is transferred into a drying chamber 4 that communicates with this cleaning chamber 3 to interrupt the communication of the cleaning chamber 3 with the drying chamber 4. Next, a depression mechanism 18 connected to the drying chamber 4 is actuated to perform the decompression drying of the cleaning object 8 in the drying chamber 4. After this decompression drying, outer air is introduced into the drying chamber 4 by opening a control valve 20 connected to the drying chamber 4 to bring the gas in a fluid contact with the cleaning object 8 in the drying chamber 4, thereby physically remove microparticles sticking to the surface of the cleaning object. 【課題】被洗浄物の洗浄液による浸漬洗浄、蒸気洗浄、乾燥等の洗浄作業を、簡易な手段で精密に行うことを可能とする。【解決手段】被洗浄物８の蒸気洗浄又は液洗浄を洗浄室３内で行った後、この洗浄室３と連通する乾燥室４に被洗浄物８を移送して洗浄室３と乾燥室４との連通を遮断する。次に、乾燥室４に接続した減圧機構１８を作動して乾燥室４内で被洗浄物８の減圧乾燥を行う。この減圧乾燥後に乾燥室４に接続した制御弁２０を開放して乾燥室４内に外気を導入し、乾燥室４内の被洗浄物８に気体を流動接触させ、被洗浄物の表面に付着している微粒子を物理的に除去する。【選択図】図１