MULTILAYER CERAMIC WIRING BOARD
PROBLEM TO BE SOLVED: To provide a multi-layer ceramic wiring board in which one end face of a non-conductive veer conductor insulated from a wiring layer in a substrate in part of a conductor pattern exposed from the surface of the substrate, which is formed from low-temperature fired ceramic layer...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a multi-layer ceramic wiring board in which one end face of a non-conductive veer conductor insulated from a wiring layer in a substrate in part of a conductor pattern exposed from the surface of the substrate, which is formed from low-temperature fired ceramic layers arranged in layers, or a pad surface connected to the one end face are coated with an Au plating layer free from abnormal color tone.SOLUTION: A multi-layer ceramic wiring board 1 comprises: a substrate body 2 composed of ceramic layers C1 to C3 arranged in layers and having a surface 3 and a back 4; a non-conductive veer conductor 5 extending through the ceramic layer C1 and not electrically connected to another veer conductor 10; and a pad 7 connected to the lower-end face of the non-conductive veer conductor 5 and located between ceramic layers C1, C2. The conductivity of the non-conductive veer conductor 5 and the pad 7 is not lower than 55.0×10S/m. The area A1 of the end face of the non-conductive veer conductor 5, exposed from the surface 3, is not smaller than 7.0×10μm. The end face of the non-conductive veer conductor 5, which is exposed from the surface 3, is coated with an Au plating layer 9.
【課題】低温焼成セラミック層を積層した基板表面に露出する導体パターンの一部で基板内の配線層と絶縁されている非導通ビア導体の一端面、または該一端面に接続されたパッド表面に色調異常のないAuメッキ層が被覆された多層セラミック配線基板。【解決手段】セラミック層C1〜C3を積層してなり、表面3および裏面4を有する基板本体2と、セラミック層C1を貫通し、別のビア導体10とは電気的に接続されない非導通ビア導体5と、非導通ビア導体5の下端面に接続され、セラミック層C1,C2間に位置するパッド7と、を備えた多層セラミック配線基板1であって、非導通ビア導体5およびパッド7の導電率は、55.0?106S/m以上で、非導通ビア導体5の上記表面3に露出する端面の面積A1が、7.0?103μm2以上であり、非導通ビア導体5の上記表面3に露出する端面には、Auメッキ層9が被覆されている、多層セラミック配線基板1。【選択図】図2 |
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