THREE-DIMENSIONAL COORDINATE MEASURING INSTRUMENT

PROBLEM TO BE SOLVED: To provide a high accuracy three-dimensional coordinate measuring instrument capable of manufacturing with simple constitution and at low manufacturing cost.SOLUTION: A three-dimensional coordinate measuring instrument measures a measured object on a base 11 by using a measurem...

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Bibliographische Detailangaben
Hauptverfasser:	OKUBO NOBUHIRO, FUSAYASU KAZUHISA, KAWAKAMI TETSUJI, GOMI KEIICHIRO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a high accuracy three-dimensional coordinate measuring instrument capable of manufacturing with simple constitution and at low manufacturing cost.SOLUTION: A three-dimensional coordinate measuring instrument measures a measured object on a base 11 by using a measurement probe 51 that is moved by a movement mechanism 31, 60, 70, 80 arranged across the base 11. The movement mechanism 31, 60, 70, 80 includes on one side a linear guide having a driving unit movable with respect to the base 11, and on the other side an air bearing mechanism 80 that is moved parallel with the linear guide. 【課題】簡単な構成で、低い製造コストで製造できる高精度の三次元座標測定機を提供する。【解決手段】ベース１１を跨いで配置される移動機構３１、６０、７０、８０により移動する測定プローブ５１を用いて、ベース１１上の被測定物を測定する三次元座標測定機において、移動機構３１、６０、７０、８０は、片側に、ベース１１に対して移動可能な駆動部をもつリニアガイドを備え、もう一方の片側に、リニアガイドと平行に移動するエアーベアリング機構８０を配置している。【選択図】図５