METHOD FOR PRODUCING POROUS ZINC OXIDE THIN FILM, POROUS ZINC OXIDE THIN FILM FORMED BY THE METHOD, AND POROUS ZINC OXIDE FUNCTIONAL THIN FILM USING THE SAME

PROBLEM TO BE SOLVED: To provide a porous zinc oxide thin film that is doped or not doped with a 3B group element and to provide a method for producing the porous zinc oxide thin film.SOLUTION: The method for producing a porous zinc oxide thin film comprises applying any of compositions A to C as given below to a substrate surface in an inert gas atmosphere and then performing heating operation at least once. The composition A comprises: a partial hydrolyzate produced by adding water to an organic solvent solution of an organozinc compound of formula (1); and a halogen-containing organic compound. The composition B comprises: a partial hydrolyzate produced by adding water to an organic solvent solution of an organozinc compound of formula (1) and a 3B group element compound of formula (2) or (3); and a halogen-containing organic compound. The composition (C) comprises a partial hydrolyzate produced by adding water to an organic solvent solution of an organozinc compound of formula (1); a 3B group element compound of formula (2) or (3); and a halogen-containing organic compound. Formula (1) is R-Zn-Rand formula (2) is MX'aHO. 【課題】３Ｂ族元素がドープ又は非ドープの多孔質状の酸化亜鉛薄膜とその製造方法の提供。【解決手段】下記組成物Ａ〜Ｃいずれかを不活性ガス雰囲気下、基板表面に塗布し、次いで加熱操作を最低1回行うことを含む、多孔質状酸化亜鉛薄膜の製造方法。組成物Ａ：式（１）の有機亜鉛化合物の有機溶媒溶液に水を添加した部分加水分解物、及びハロゲン含有有機化合物を含有する。組成物Ｂ：一般式（１）の有機亜鉛化合物と、式（２）又は（３）の３Ｂ族元素化合物の有機溶媒溶液に、水を添加した部分加水分解物及びハロゲン含有有機化合物を含有する。組成物Ｃ：式（１）の有機亜鉛化合物の有機溶媒溶液に水を添加した部分加水分解物、式（２）又は（３）の３Ｂ族元素化合物、及びハロゲン含有有機化合物を含有する。Ｒ1−Ｚｎ−Ｒ1（１）ＭcＸd・ａＨ2Ｏ（２）【選択図】なし