ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM DEVICE INCLUDING THE SAME

PROBLEM TO BE SOLVED: To provide an aberration corrector capable of obtaining an image of high definition by reducing the variation of a multipolar magnetic field, and to provide a charged particle beam device including the aberration corrector.SOLUTION: An aberration corrector includes: a plurality...

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Bibliographische Detailangaben
Hauptverfasser: TEI TOMOKI, NAKANO TOMONORI, URANO KOTOKO, KASHIMA HIDEO, OHASHI KENYOSHI, SUZUKI NAOMASA, BABA HIROAKI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an aberration corrector capable of obtaining an image of high definition by reducing the variation of a multipolar magnetic field, and to provide a charged particle beam device including the aberration corrector.SOLUTION: An aberration corrector includes: a plurality of magnetic field type poles 101, 102, 103, 104, 112; a ring 114 for magnetically connecting the plurality of poles; and an adjustment member 116 provided between the poles and the ring to adjust a gap between the poles and the ring for each pole. 【課題】多極子の磁場のばらつきを低減し、高分解能な画像が得られる収差補正器及びそれを用いた荷電粒子線装置を提供する。【解決手段】収差補正器において、磁界型の複数の極子101、102、103、104、112と、複数の極子を磁気的に接続させるリング114と、極子とリングとの間に設けられ、極子とリングとの間の間隔を極子毎に調整する調整部材116と、を有する。【選択図】図3