METHOD FOR PACKAGING Na CONTAINING SPUTTERING TARGET

PROBLEM TO BE SOLVED: To provide a method of packaging an Na containing sputtering target, capable of preventing an Na containing sputtering target from being contacted with moisture and preventing trouble due to the absorption of the moisture from occurring, and an Na containing sputtering target p...

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Bibliographische Detailangaben
Hauptverfasser:	MOROHOSHI TATSUYA, MAEDA JUN, YAMAGISHI KOICHI, MATSUNAGA KENTARO, MORIMOTO TOSHIO, KUROMIYA YASUTO, TAKAHASHI TATSUYA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS STORING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method of packaging an Na containing sputtering target, capable of preventing an Na containing sputtering target from being contacted with moisture and preventing trouble due to the absorption of the moisture from occurring, and an Na containing sputtering target package obtained thereby.SOLUTION: An Na containing sputtering target 2 is packaged with a packaging material 5 formed of a resin film, and the whole sputtering surface of the Na containing sputtering target 2 is covered with a desiccant 4 having a dry strength of 1.0 mgHO/l or less. 【課題】ナトリウムを含有するスパッタリングターゲットと水分の接触を防止し、水分の吸湿による不具合の発生を防止したＮａ含有スパッタリングターゲットの包装方法及びその包装方法によって得られたＮａ含有スパッタリングターゲットパッケージを提供する。【解決手段】Ｎａ含有スパッタリングターゲット２を樹脂製フィルムの包装材５で包装するとともに、Ｎａ含有スパッタリングターゲット２のスパッタリング面の全面を乾燥強度１．０ｍｇＨ２Ｏ／ｌ以下の乾燥剤４で被覆する。【選択図】図１