METHOD OF MANUFACTURING MULTIPOLE LENS, MULTIPOLE LENS, AND CHARGED PARTICLE BEAM DEVICE
PROBLEM TO BE SOLVED: To provide a method of manufacturing a multipole lens capable of forming a pole with high accuracy while achieving downsizing.SOLUTION: Disclosed is a method of manufacturing a multipole lens which includes the steps of: forming a first member 10 obtained by integrally forming...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method of manufacturing a multipole lens capable of forming a pole with high accuracy while achieving downsizing.SOLUTION: Disclosed is a method of manufacturing a multipole lens which includes the steps of: forming a first member 10 obtained by integrally forming a first pole 12 and a first yoke 14; forming a second member obtained by integrally forming a second pole 22 and a second yoke 24; and overlapping the first yoke 14 and the second yoke 24 to fix the first member 10 and the second member 20.
【課題】小型化を図りつつ、高い精度で極子を形成することができる多極子レンズの製造方法を提供する。【解決手段】多極子レンズの製造方法は、第１極子１２と第１ヨーク１４とが一体に形成された第１部材１０を形成する工程と、第２極子２２と第２ヨーク２４とが一体に形成された第２部材２０を形成する工程と、第１ヨーク１４と第２ヨーク２４とを重ねて、第１部材１０と第２部材２０を固定する工程と、を含む。【選択図】図４ |
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