LIGHTING SYSTEM FOR INSPECTION, AND INSPECTION METHOD USING THE LIGHTING SYSTEM

PROBLEM TO BE SOLVED: To efficiently detect all defects including a defect such as streaks, which are difficult to detect, as much as possible in a single step.SOLUTION: A lighting system 10 for inspection according to the present invention is a lighting system for projecting, on an inspection target surface 1, a stripe pattern image 21 in which a plurality of bright parts 19 and dark parts 20 are alternately arranged. In the stripe pattern image 21, one bright part 19 selected from the plurality of bright parts 19 and one dark part 20 adjacent thereto have a linear boundary 22 formed therebetween, and one bright part 19 and the other dark part 20 adjacent thereto on the opposite side of one dark part 20 have a curved boundary 23 formed therebetween. 【課題】スジの如き検出困難な欠陥を含め、極力全ての欠陥を１つの工程で効率よく検出する。【解決手段】本発明に係る検査用照明装置１０は、複数本の明部１９及び暗部２０を交互に配列してなるストライプパターン像２１を被検査面１に投影するための照明装置であって、ストライプパターン像２１は、複数本の明部１９の中から選択される一の明部１９とこれに隣接する一方の暗部２０との間に直線状の境界２２を形成し、一方の暗部２０とは反対側で隣接する他方の暗部２０との間に曲線状の境界２３を形成する。【選択図】図５