CHARGED PARTICLE BEAM INSPECTION METHOD AND APPARATUS

PROBLEM TO BE SOLVED: To provide a charged particle beam inspection technology configured to simplify static elimination operation to reduce the time required for the static elimination, and to allow multiple kinds of inspections with one inspection device, while improving throughput.SOLUTION: A cha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OTA TAKUMI, HATAKEYAMA MASAKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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