CHARGED PARTICLE BEAM INSPECTION METHOD AND APPARATUS

PROBLEM TO BE SOLVED: To provide a charged particle beam inspection technology configured to simplify static elimination operation to reduce the time required for the static elimination, and to allow multiple kinds of inspections with one inspection device, while improving throughput.SOLUTION: A charged particle beam inspection apparatus 71 includes: a stage 29 on which a sample S is mounted; an electron gun 41 which irradiates the sample S with a charged particle beam; a detector 47 which detects a signal obtained from the sample S; an image processing section 61 which forms an image from the signal from the detector 47; an energy control section 65 which controls beam energy of the charged particle beam irradiated on the sample S; a main chamber 11 which keeps the sample S under inspection in a vacuum state; a conveyance robot 27 which conveys the sample S to the main chamber 11; a conveyance chamber 9 which keeps the conveyance robot 27 in a vacuum state; and a static elimination apparatus 73 arranged in the conveyance chamber 9. 【課題】除電作業を簡素化して除電に要する時間を低減し、一つの検査装置で複数種類の検査を行うことができるスループットを向上した荷電粒子ビーム検査技術を提供する。【解決手段】荷電粒子ビーム検査装置７１は、試料Ｓを搭載するステージ２９と、荷電粒子ビームを試料Ｓに照射する電子銃４１と、試料Ｓから得られる信号を検出する検出器４７と、検出器４７からの信号から像を形成する画像処理部６１と、試料Ｓへ照射する荷電粒子ビームのビームエネルギーを制御するエネルギー制御部６５と、検査中の試料Ｓを真空状態に保持するメインチャンバ１１と、メインチャンバ１１へ試料Ｓを搬送する搬送ロボット２７と、搬送ロボット２７を真空状態に保持する搬送チャンバ９と、搬送チャンバ９内に設けられた除電装置７３とを備える。【選択図】図７