METHOD FOR OPTIMIZING ION OPTICAL SYSTEM PARAMETER FOR IMPROVING SIGNAL STABILITY AGAINST FLUCTUATION DURING ION BEAM DRAWING PROCESS FROM PLASMA

PROBLEM TO BE SOLVED: To improve signal stability by reducing amount of signal drift relating to an induction coupling plasma mass spectrometer.SOLUTION: Relating to an induction coupling plasma mass spectrometer, a method is disclosed for improving stability of a detection signal from ion detection means. The method includes in which, 1) a pseudo sample containing at least one kind of element is prepared, 2) the pseudo sample ia introduced into the induction coupling plasma mass spectrometer, and by changing a voltage applied to an ion optical system as time passes, measures the pseudo sample, 3) for the element, the amount of change in detection signal that changes between detections is obtained, 4) based on the obtained change amount, a voltage at which the detection signal is most stable is selected, and is used for analysing the sample. 【課題】誘導結合プラズマ質量分析装置において、信号ドリフトの量を低減して信号安定性を改善する【解決手段】誘導結合プラズマ質量分析装置において、イオン検出手段からの検出信号の安定性を高めるための方法が開示される。その方法は、１）少なくとも１種類の元素を含む擬似試料を準備し、２）誘導結合プラズマ質量分析装置に擬似試料を導入して時間経過とともにイオン光学系に印加される電圧を変更しながら、擬似試料を測定し、３）当該元素に関して、各電圧において検出信号が検出の間に変化する変化量を求め、４）求めた変化量に基づいて、検出信号が最も安定する電圧を選択して、当該電圧を試料の分析のために使用することを含む。【選択図】 図２