TESTING DEVICE AND TESTING METHOD

TESTING DEVICE AND TESTING METHOD

PROBLEM TO BE SOLVED: To provide a testing device and a testing method that reduce effects of noises.SOLUTION: A testing device according to the present invention comprises: a work table 26 on which a panel to be tested 12 is placed; a probe unit 30 having a probe 38 that contacts an electrode 12a o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FUKUSHI TAKAHIRO, KIMURA KATSUHIKO, MIURA KAZUYOSHI, KUDO TAKAYOSHI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
FREQUENCY-CHANGING
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PHYSICS
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a testing device and a testing method that reduce effects of noises.SOLUTION: A testing device according to the present invention comprises: a work table 26 on which a panel to be tested 12 is placed; a probe unit 30 having a probe 38 that contacts an electrode 12a of the panel to be tested 12 placed on the work table 26; and a stage 11 that moves the work table 26 so as to allow the probe 38 to contact the electrode 12a of the panel to be tested 12 placed on the work table 26. The stage 11 is earthed and supports the work table 26. A resistor is provided between the stage 11 and the work table 26. 【課題】ノイズの影響を低減することができる検査装置、及び検査方法を提供すること。【解決手段】本発明にかかる検査装置は、検査パネル１２が載置されるワークテーブル２６と、ワークテーブル２６上に載置された検査パネル１２の電極１２ａと接触するプローブ３８を有するプローブユニット３１と、ワークテーブル２６上に載置された検査パネル１２の電極１２にプローブ３８を接触させるために、ワークテーブル２６を移動するステージ１１と、を備え、ステージ１１が接地され、抵抗体を介してステージ１１がワークテーブル２６を支持している検査装置。【選択図】図５