SHAPE MEASUREMENT INSTRUMENT

PROBLEM TO BE SOLVED: To provide a capacitive shape measurement instrument which is capable of measuring a shape of a highly irregular surface of a measurement object without contacting by detection electrodes arrayed on a plane on which wiring is less complicated.SOLUTION: The shape measurement instrument includes a sensor electrode 01 in which a plurality of band-shaped electrodes arrayed in an X axis direction and insulating layers are alternately laminated in a Z axis direction and the laminated electrodes have one-side ends arranged in a line on the Z axis and have the other-side ends made stepwise in the Z axis direction, a driving circuit 06 which applies an AC signal to electrodes as detection electrodes out of the plurality of laminated band-shaped electrodes, a buffer circuit 08 which applies a voltage of the detection electrodes to electrodes as shield electrodes out of the plurality of laminated band-shaped electrodes and of which the input the detection electrodes are connected to, and so on. 【課題】配線の複雑さが少ない平面上に配列された検知電極により、凹凸が大きな測定対象物の表面形状を非接触で計測できる、静電容量型の形状測定装置を提供する。【解決手段】Ｘ軸方向に配列した複数の帯状の電極と、絶縁層とを、交互にＺ軸方向に積層したものであって、積層された前記電極の一端はＺ軸上にそろって配置されていて、積層された前記電極の他端はＺ軸方向に階段状になっているセンサー電極０１と、積層された複数の帯状の前記電極のうち、検出電極となる電極に交流信号を印加する駆動回路０６と、積層された複数の帯状の前記電極のうち、シールド電極となる電極に、前記検出電極の電圧を印加する、検出電極が入力に接続されているバッファ回路０８などを備えることを特徴とする形状測定装置。【選択図】図１