INSPECTION JIG

PROBLEM TO BE SOLVED: To provide an inspection jig that enables improvement in positioning accuracy of a contact shoe contacting with a substrate.SOLUTION: An inspection jig 1 has: a frame 40; an electrode body 6 that includes an electrode 7; a conductive contact shoe 5 that has a wire-like shape; a support block 100 that has a facing surface 2a having an inspected substrate A facedly arranged, guides one end of the contact shoe 5 to an inspection point of the inspected substrate A loaded in the facing surface 2a and guides one end of the contact shoe 5 to the electrode 7, and is relatively movable to the frame 40 in a movement direction intersecting the facing surface 2a; an urging part 14 that stays the support block 100 away from the electrode body 6, and urges the support block 100 in a direction heading for the inspected substrate A; and a regulation plate 9 which extends in an extension direction heading for the frame 40 from the support block 100, is provided between the support block 100 and the frame 40, and has a contraction property, and whose deformation is regulated with respect to a first direction parallel to the facing surface 2a and intersecting the extension direction. 【課題】基板に接触する接触子の位置決め精度を向上することができる検査治具を提供する。【解決手段】検査治具１は、フレーム４０と、電極７を備える電極体６と、ワイヤ状の形状を有する導電性の接触子５と、被検査基板Ａが対向配置される対向面２ａを有し、対向面２ａに載置された被検査基板Ａの検査点へ接触子５の一端を案内し、接触子５の他端を電極７に案内し、かつ対向面２ａと交差する移動方向に沿ってフレーム４０に対して相対移動可能な支持ブロック１００と、支持ブロック１００を、電極体６から遠ざかり、被検査基板Ａに向かう方向に付勢する付勢部１４と、支持ブロック１００からフレーム４０に向かう延設方向に延びて支持ブロック１００とフレーム４０との間に架設され、伸縮性を有すると共に、対向面２ａと平行かつ延設方向と交差する第１方向に対する変形が規制された規制プレート９とを備えた。【選択図】図１