INFRARED RADIATION ELEMENT AND MANUFACTURING METHOD THEREOF

PROBLEM TO BE SOLVED: To provide an infrared radiation element and a manufacturing method thereof capable of preventing a heating layer from getting damage.SOLUTION: An infrared radiation element 1 includes: a substrate 11; an insulation layer 12 formed over the surface of the substrate 11; and a heating layer 13 formed above the surface of the insulation layer 12. The infrared radiation element 1 has a shape stabilization layer 14 for stabilizing the shape of the heating layer 13 disposed between the insulation layer 12 and the heating layer 13. The substrate 11, the insulation layer 12, the shape stabilization layer 14 and the heating layer 13 are integrated with each other. 【課題】発熱層の損傷を防止することが可能な赤外線放射素子及びその製造方法を提供する。【解決手段】赤外線放射素子１は、基板１１と、基板１１の表面上に設けた絶縁層１２と、絶縁層１２の表面の上方に設けた発熱層１３と、を備える。また、赤外線放射素子１は、絶縁層１２と発熱層１３との間に発熱層１３の形状を安定化させる形状安定化層１４を介在させてあり、基板１１と絶縁層１２と形状安定化層１４と発熱層１３が一体化されている。【選択図】図１