MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF DODECACARBONYL TRIRUTHENIUM

PROBLEM TO BE SOLVED: To provide a manufacturing method of dodecacarbonyl triruthenium (DCR) capable of efficiently subliming even a large amount of coarse DCR and stably supplying DCR, and to provide a sublimation apparatus applicable to the manufacturing method.SOLUTION: A manufacturing method of an organoruthenium compound for a chemical vapor deposition material which is made of DCR comprises a process of isolating an impurity element from coarse DCR 201 to refine DCR by a sublimation method by using a heating vessel 100. In the refining process, after coarse DCR is heated under atmosphere of CO concentration at 30 to 100% and sublimed at temperature of 100 to 130°C, DCR is crystallized by cooling. In a sublimation apparatus, a heating evaporation part comprises a sintering filter 200 with filtration accuracy at 5 to 30 and heaters 102 as a table for mounting coarse DCR, and a trap filter 400 of impurity elements through which CO is supplied from below is equipped in a middle of a flow channel of sublimed DCR. 【課題】ドデカカルボニルトリルテニウム（ＤＣＲ）の製造方法において、大量の粗ＤＣＲも効率よく昇華することができ、ＤＣＲを安定供給できる方法の提供。亦、前記製造方法に適用可能な昇華装置の提供。【解決手段】ＤＣＲからなる化学蒸着原料用の有機ルテニウム化合物の製造方法において、加熱容器１００を用いて、昇華法により、粗ＤＣＲ２０１から不純物元素を分離してＤＣＲを精製する工程を備え、精製工程ではＣＯ濃度３０〜１００％の雰囲気下で粗ＤＣＲを加熱して温度１００〜１３０℃で昇華させた後、冷却してＤＣＲを析出させるＤＣＲの製造方法。加熱蒸発部には粗ＤＣＲの載置し加熱する台として、ろ過精度５〜３０の焼結フィルター２００と加熱装置１０２を備え、下からＣＯを供給し、昇華されたＤＣＲの流路途中に不純物元素のトラップフィルター４００を備える昇華装置。【選択図】図１