CHEMICAL CONTAINER REPLACEMENT DEVICE AND SUBSTRATE PROCESSING DEVICE

PROBLEM TO BE SOLVED: To provide a chemical container replacement device capable of replacing a chemical container without requiring manual work, reducing a burden on an operator, and suppressing deterioration and particle contamination of a chemical liquid.SOLUTION: A plurality of container holders 2 on which a chemical container 3 is positioned are arranged along the orbit including the replacement position P13 of the chemical container 3. The container holder 2 on which the used chemical container is mounted is moved to the replacement position P13 along the orbit by a driving mechanism and the used chemical container in the replacement position P13 is replaced with a new chemical container by using a transfer mechanism. Furthermore, an area of arranging and replacing the chemical container 3 is made to be a closed area by also performing the attaching and detaching of a chemical liquid supply passage with a nozzle attaching/detaching mechanism. 【課題】人手を介さずに薬液容器の交換をすることが可能で作業者の負担が軽減でき、薬液の変質、パーティクル汚染を抑えることができる薬液容器交換装置を提供する。【解決手段】薬液容器３が配置される複数の容器保持体２を薬液容器３の交換位置Ｐ１３を含む周回軌道に沿って配置している。そして使用済みの薬液容器が載置された容器保持体２を駆動機構により周回軌道に沿って交換位置Ｐ１３まで移動させ、移載機構を用いて交換位置Ｐ１３にある使用済みの薬液容器と新たな薬液容器との交換を行っている。さらに薬液供給路の着脱動作もノズル着脱機構により実行することで、薬液容器３の配置、交換領域を閉鎖的な領域にする。【選択図】図４