COOLER USED IN PLASMA GENERATION CHAMBER OF RADIATION SOURCE FOR EXTREME ULTRAVIOLET WAVELENGTH RANGE

PROBLEM TO BE SOLVED: To provide a cooler for use in a plasma generation chamber of a radiation source for an extreme ultraviolet wavelength range, excellent in sealing properties.SOLUTION: The cooler includes a heat sink 37 manufactured of a substrate material 36 having a thermal conductivity of gr...

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Hauptverfasser:	KIEREY HOLGER, ARNO SCHMIDTNER, WEIGL BERNHARD, MARCUS SCHMELZEISEN, ANDERL WILLI, ANN-KATHRIN WANDNER, MARKUS BAUER, ANDREAS KOLLOCH
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES X-RAY TECHNIQUE
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