CLEANING METHOD AND CLEANING DEVICE

PROBLEM TO BE SOLVED: To provide a cleaning method and a cleaning device that enable effective cleaning while using more properties effective to micro bubble cleaning.SOLUTION: A cleaning method of applying treatment liquid to a cleaning target to clean the cleaning target comprises a first step (S3...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HIROSE HARUMICHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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