CHARGED PARTICLE BEAM DEVICE, SAMPLE OBSERVATION METHOD FOR CHARGED PARTICLE BEAM DEVICE, AND DISPLAY CONTROL PROGRAM FOR CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To implement a charged particle beam device for enabling a user to acquire excellent data after minimum user learning, improve the user's skill through operation, and feel sense of accomplishment.SOLUTION: A charged particle beam device comprising a control unit for controlling a charged particle beam source, charged particle optical system, detector, sample stage, sample room, and image display device, displays a message for confirming, with an operator, whether a phenomenon of image distortion, brightness unevenness, lack of stereoscopic effect, or an image blur occurs in a sample image, a first button to be pushed by the operator when the phenomenon of image distortion, brightness unevenness, or lack of stereoscopic effect occurs in the sample image, and a second button to be pushed by the operator when the phenomenon of image blur occurs in the sample image, with the sample image on the display unit; and displays a message showing a cause according to an observation condition when the first button or the second button is pushed. Thereby, even a beginner can easily recognize quality of an imaging result and obtain a cause and solution, which improves his/her skill on the charged particle beam device to enable improvement of image quality. 【課題】最小限のユーザ学習で良いデータを取得できユーザが操作を通して上達し、達成感を感じられる荷電粒子線装置を実現する。【解決手段】荷電粒子源、荷電粒子光学系、検出器、試料ステージ、試料室及び画像表示装置を制御する制御部を備え試料画像に画像が歪む、明るさムラがある、立体感がない、像がぼける現象が発生していないかを操作者に確認するメッセージと、試料画像に画像が歪む、明るさムラがある、立体感がない現象が発生している場合に操作者が押下する第１ボタンと、試料画面に画像のぼけ現象が発生する場合に操作者が押下する第２ボタンとを試料画像と共に表示部に表示し第１ボタン又は第２ボタンが押下された場合に観察条件に応じて原因を記したメッセージを表示する。初心者でも撮影結果の良し悪しを容易に認識し原因と解決策を知ることで荷電粒子装置のスキルが向上し、画像の改善が可能となる。【選択図】図２