CLEANING DEVICE

PROBLEM TO BE SOLVED: To provide a cleaning device capable of removing foreign materials without damaging a cleaning object.SOLUTION: A cleaning device comprises: a pad part 2 having a flat bottom surface 11 facing a cleaning object 92 and floating on the cleaning object 92 by the ultrasonic vibration of the cleaning object 92; a cover part 3 covering the upper surface and side surface of the pad part 2 while having a space 24 between the upper surface and side surface of the pad part 2 and the cover part 3; and a suction means 4 being connected to the cover part 3 and suctioning a gas in the space between the pad part 2 and the cover part 3. An opening 28 is formed between the lower end part 27 of the cover part 3 and the side surface of the pad part 2 and the position of the lower end part 27 is higher than the bottom surface 11 of the pad part 2. 【課題】清掃対象物を傷つけることなく異物を除去することのできる清掃装置を提供する。【解決手段】清掃対象物９２と対向する平坦な底面１１を有し、清掃対象物９２の超音波振動によって清掃対象物９２上で浮上するパッド部２と、パッド部２の上面との間およびパッド部２の側面との間に隙間２４を有しながらパッド部２の上面および側面を覆うカバー部３と、カバー部３に接続され、パッド部２とカバー部３との隙間の気体を吸引する吸引手段４と、を備え、カバー部３の下端部２７とパッド部２の側面との間には開口部２８が形成され、当該下端部２７は、パッド部２の底面１１よりも高い位置にある。【選択図】図３