METHOD AND DEVICE FOR EXECUTING LASER FILAMENTATION IN TRANSPARENT MATERIAL

PROBLEM TO BE SOLVED: To provide a method and a system for forming continuous laser filament in a transparent material.SOLUTION: Burst of an ultra high speed laser pulse is so converged that a beam waist is formed on an external part 175 of a material 115 to be processed. An energy density, which is...

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Bibliographische Detailangaben
Hauptverfasser:	NA JUNG UN, GILBERT ALBELO, S ABBAS HOSSEINI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMISTRY CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GLASS MACHINE TOOLS MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY MINERAL OR SLAG WOOL PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM WORKING CEMENT, CLAY, OR STONE WORKING STONE OR STONE-LIKE MATERIALS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method and a system for forming continuous laser filament in a transparent material.SOLUTION: Burst of an ultra high speed laser pulse is so converged that a beam waist is formed on an external part 175 of a material 115 to be processed. An energy density, which is sufficient for supporting formation of a continuous filament 170 without generating an external plasma channel and causing optical breakage of the material on an expanded area in the interior of the material, is formed. A filament formed by this method may have a length exceeding 10 mm. With use of an aberration optical convergence element 150, an external beam waist is formed and an incident beam 165 is dispersed and converged in the interior of the material. For cleaving/singulation and/or marking, formation of a filament array in the interior of a transparent substrate is promoted. With utilization of optical monitoring, a feedback, which promotes an active control for processes, is provided. 【課題】透明材料内に、連続的なレーザーフィラメントを形成するシステムおよび方法を提供する。【解決手段】超高速レーザーパルスのバーストを、加工対象の材料１１５の外部１７５にビームウエストが形成されるように集束する。外部プラズマチャネルを形成することなく、かつ材料の内部の拡張された領域内に、材料内での光学破壊を引き起こすことなく、連続的なフィラメント１７０の形成をサポートするための、十分なエネルギー密度が形成される。この方法で形成されたフィラメントは、長さが１０ｍｍを超え得る。収差光学集束要素１５０を利用して、外部ビームウエストを生成しつつ、材料の内部で入射ビーム１６５を分散集束させる。クリービング／シンギュレーションおよび／またはマーキングのために、透明基板の内部でのフィラメントアレイの形成を促進する。フィラメントの光学監視を利用して、工程の能動制御を促進するフィードバックを提供する。【選択図】図１（ｃ）